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ESDP dry screw vacuum pump

Inhalation efficiency (increased by 15%). Exhaust efficiency improved (2-stage variable, continuously variable frequency).

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Advantageous features

　　Inhalation efficiency (increased by 15%).

　　Improved exhaust efficiency (2-stage variable, continuously variable frequency).

　　极限 pressure: 1 × 10⁻² Torr.

　　The exhaust temperature is reduced by 50%.

　　Electricity consumption reduced by 30%.

　　It doesn't use oil or water, so it won't cause oil or water pollution.

　　Low power consumption, low noise, low vibration, excellent dynamic balance, no inertial forces, and capable of high-speed operation.

　　The design features a simple structure, is easy to maintain, has low maintenance costs, requires no wear-and-tear parts, and boasts a long service life.

　　Wide range of applications and high vacuum performance.

　　Long service life; all gas-contact parts are coated with polytetrafluoroethylene, nickel, and Hastelloy alloy.

　　It does not use mechanical seals, so the sealing components remain free of contamination and are less likely to fail frequently due to contamination.

　　Adopting a rare lubrication method both before and after, enhancing bearing durability.

Standard accessories

　　Base and protective cover

　　Exhaust muffler and intake separator

　　Air intake

　　Check valve

　　Vacuum gauge

Optional accessories

　　Suction filter

　　Exhaust condenser

　　Inhalation-type gas-liquid separator

　　Flow switch and temperature switch

Application Scope of ESDP Dry Screw Pumps

　　The ESDP series finds applications in semiconductor synthesis and liquid crystal production, primarily in semiconductor plasma-enhanced chemical vapor deposition (PECVD) and reactive ion etching (RIE) processes, as well as in the etching processes used in liquid crystal manufacturing and in the CVD processes for producing TFT displays and plasma displays (PLASMA). This process requires zero backflow to protect the workpieces from contamination.

　　In petrochemical processes, the primary focus is on extracting condensable gases, toxic gases, corrosive gases, or gases containing fine particulates.

　　In the pharmaceutical industry, it is used for vacuum drying of drugs, recovery of drug intermediates, recycling of gaseous disinfectants, and providing clean, sterile conditions for artificial organs, among other applications.

　　In chemical engineering, used for vacuum distillation and solvent extraction recovery—for example, processes such as the extraction and recovery of acetone and polyols.

　　Industrial exhaust; centralized vacuum processing system

　　Mixing process of the extruder and degassing process for sheets

　　Mixed-resin deodorization process; used in fatty acid production to eliminate water pollution and remove blockages in ejectors.

　　The food industry uses it for flavor and fragrance concentrates, food packaging, and more.

Technical Parameters

Model	Pumping capacity	Limit Pressure	Motor Power	Rotational speed	Intake	Exhaust	Cooling Water volume	Noise	Weight
Model	m³/h	Pa	KW	RPM	mm	mm	L/min	dB	Kilogram
ESDP320	260	1.33	7.5	2900	65	50	10	80	320
ESDP430	360	1.33	11	2900	65	50	12	80	380
ESDP650	540	1.33	15	2900	80	65	12	80	580
ESDP900	750	1.33	18.5	2900	100	65	20	80	680
ESDP1500	1400	1.33	37	2900	125	80	30	82	950