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Roots screw vacuum pump unit

Chemical industry, pharmaceuticals, semiconductors, solvent recovery, molding, crystallization, dry etching, sputtering, vapor recovery, high-altitude simulation.

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　　The Roots vacuum pump is a device that offers a high pumping speed within the vacuum range of 0.1 to 1000 Pa at a relatively low cost. It can be combined with various other vacuum pumps to form a vacuum system, effectively increasing the pumping speed at lower pressures and extending the operating range of the forepump. When paired with a dry screw vacuum pump, this combination ensures cleaner evacuated containers and a more reliable system. All products undergo dynamic balancing and leak tests before leaving the factory.

　　The gas is drawn into the pump chamber through the intake pipeline and then discharged by the main vacuum pump to the inlet of the forepump. Due to the small clearance—between 0.2 and 0.6 mm—between the rotor and the machine housing during rotation, this product achieves clean vacuum discharge, meaning that neither the machine housing nor the rotor requires lubrication. Moreover, since there is no contact between the rotor and the machine housing, even at high rotational speeds (up to 3,600 rpm), the rotor can be used semi-permanently. This product does not employ mechanical seals, so long-term chemical exposure will not lead to bearing contamination.

Typical Applications of Roots Screw Vacuum Pump Units

Chemical industry, pharmaceuticals, semiconductors, solvent recovery, molding, crystallization, dry etching, sputtering, vapor recovery, high-altitude simulation.

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