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2021-01-18

Selection of Vacuum Pumps

When selecting a vacuum pump, the following points should be taken into account: 1. The operating pressure of the vacuum pump must meet both the ultimate vacuum requirement and the working pressure requirement of the vacuum equipment. For example, if a vacuum coating process requires a vacuum level of 1×10^-5 mmHg, the vacuum pump selected must have an ultimate vacuum capability of at least 5×10^-6 mmHg. Generally, the vacuum pump’s ultimate vacuum should be half to one order of magnitude higher than the vacuum equipment’s required vacuum level. 2. Select the operating point of the vacuum pump correctly. Each type of pump has a specific working pressure range. For instance, diffusion pumps operate within a range of 10^-3 to 10^-7 mmHg. Within this wide pressure range, the pump’s pumping speed varies with pressure; its stable operating pressure range is typically between 5×10^-4 and 5×10^-6 mmHg. Therefore, the pump’s operating point should be chosen within this range and should not be allowed to operate continuously at pressures below 10^-8 mmHg. Similarly, titanium sublimation pumps can operate at 10^-2 mmHg, but it is best if their working pressure remains below 1×10^-5 mmHg. 3. At its operating pressure, the vacuum pump must be able to remove all the gases generated during the vacuum equipment’s process. 4. Combine vacuum pumps correctly. Since vacuum pumps have selective pumping capabilities, sometimes using just one pump may not meet the pumping requirements. In such cases, several pumps need to be combined and used in tandem to complement each other and achieve the desired pumping performance. For example, titanium sublimation pumps have a high pumping speed for hydrogen but cannot pump helium. On the other hand, triode sputtering ion pumps (or asymmetric cathode sputtering ion pumps) have a certain pumping speed for argon. Combining these two types of pumps will enable the vacuum system to achieve a better vacuum level. Additionally, some vacuum pumps cannot operate at atmospheric pressure and thus require a preliminary vacuum stage; others have outlet pressures lower than atmospheric pressure and therefore need a backing pump. Hence, it is essential to combine pumps appropriately. 5. Consider the oil contamination requirements of the vacuum equipment. If the equipment strictly demands oil-free operation, various oil-free pumps should be selected, such as liquid-ring pumps, molecular sieve adsorption pumps, sputtering ion pumps, and cryogenic pumps. If the requirements are less stringent, oil-lubricated pumps can be chosen, provided that appropriate measures are taken to prevent oil contamination—for example, by installing cold traps, baffles, or oil traps—to ensure clean vacuum conditions. 6. Understand the composition of the gas being pumped—whether the gas contains condensable vapors, particulate dust, or corrosive substances. When selecting a vacuum pump, it is crucial to know the gas composition and choose a pump that is suitable for the specific gas being pumped. If the gas contains vapors, particles, or corrosive gases, consider installing auxiliary equipment, such as condensers or dust collectors, on the pump’s inlet pipeline. 7. Assess the environmental impact of the oil vapor emitted by the vacuum pump. If the environment cannot tolerate any pollution, opt for an oil-free vacuum pump or direct the oil vapor outside the facility. 8. Determine whether the vibrations generated by the vacuum pump during operation will affect the process or the surrounding environment. If the process is sensitive to vibration, select a pump that produces no vibration or take measures to mitigate vibration. 9. Consider the cost of the vacuum pump, as well as its operating and maintenance expenses.

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